| 摘要 |
PURPOSE:To obtain a sintered body consisting of AlN having high heat conductivity and causing no change against the lapse of time by molding and degreasing a mixture consisting of a specified powdery AlN feed material with a Y compd. as a sintering additive mixed in an org. solvent, then calcining at high temp. in nonoxidizing atmosphere contg. N2 and C. CONSTITUTION:AlN feed material obtd. by direct nitridation of metallic Al contg. <=1.8wt.% O, <=0.15wt.%C, and <=0.1wt.% cationic impurities is mixed with a Y compd. (e.g., Y2O3) as sintering additive in an org. solvent. The powder mixture is then molded and degreased by heating at <=700 deg.C under <=760Torr. Then, the product is calcined at 1,700-2,100 deg.C in nonoxidizing atmosphere contg. >=1Torr partial pressure of N2 and contg. also C. Thus, a sintered body consisting of AlN contg. <=0.5wt.% O and 0.35-1.6wt.% Y, with >=0.27 weight ratio of O/Y, and >=200W/m.K heat conductivity, is obtd. |
