| 摘要 |
PURPOSE:To improve the environmental resistance of a magneto-optical film and to prolong the life thereof by forming the magneto-optical film on a substrate by reactive sputtering of a metal target in an atmosphere contg. a gaseous mixture composed of argon, hydrocarbon and fluorocarbon. CONSTITUTION:The gaseous mixture composed of the gaseous hydrocarbon, the gaseous fluorocarbon and the gaseous argon is introduced into a vacuum vessel 1 and a voltage is impressed between the metal target 4 and a counter electrode 7 to execute the reactive sputtering to deposit and form a recording film 61 on the substrate 6. The film 61 formed in such a manner is constituted of a light absorptive part 611 consisting of the fine metal particles and a matrix part consisting of an org. part 612. The environmental resistance thereof is thus improved and the life is prolonged. The execution of the sputtering in the atmosphere prepd. by adding the olefin, acetylene or styrene hydrocarbon into the gaseous mixture composed of the argon and parafinic hydrocarbon is equally well. |
