| 摘要 |
PURPOSE:To improve the environmental resistance of a magneto-optical film and to prolong the life thereof by forming the magneto-optical film on a substrate by reactive sputtering of a metal target in an atmosphere contg. a gaseous mixture composed of argon and hydrocarbon. CONSTITUTION:The gaseous mixture composed of the gaseous hydrocarbon and the gaseous argon is introduced into a vacuum vessel 1 and a voltage is impressed between the metal target 4 and a counter electrode 7 to deposit and form the recording film 61 on the substrate 6 by the reactive sputtering. The film 61 formed in such a manner is improved in the environmental resistance and the life thereof is prolonged. The recording film is formed of the hydrocarbon film having the higher environmental resistance nearer the surface of the recording film if the ratio of the argon occupied in the gaseous mixture is successively lowered. The high sensitivity is obtd. and the reproducibility is improved if the metal target is formed of the simple substance of Te, In, Se, Bi, Sb, Pb, Ag, Ga, As or Ge or the alloy thereof. |
