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发明名称
PRODUCTION OF III-V COMPOUND SEMICONDUCTOR SINGLE CRYSTAL
摘要
申请公布号
JPH01219098(A)
申请公布日期
1989.09.01
申请号
JP19880042321
申请日期
1988.02.26
申请人
HITACHI CABLE LTD
发明人
WATANABE MASATOSHI;YAMADA YOSHIHIDE
分类号
H01L21/208;C30B27/02
主分类号
H01L21/208
代理机构
代理人
主权项
地址
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