PLANE LENS AND ITS MANUFACTURE

摘要

PURPOSE:To obtain the plane lens which is easily integrated on a semiconductor substrate and has its astigmatism adjustable with ease and method to manufacture it by constituting the lens in a curved-surface recessed part formed in the top surface of the semiconductor substrate by dry etching. CONSTITUTION:An etching mask 14 which has a circular or elliptic opening 13 and is made of positive type photoresist is formed on the semiconductor substrate 11 by normal photolithography. This opening 13 is in a normal mesa shape and the etching mask 14 which has the mesa-shaped opening 13 is used for the dry etching to etch the etching mask 14 and substrate 11; and the curved- surface recessed part 12 is formed on the substrate 11 lastly to obtain a microlens. The thickness of the layer of the etching mask 14 and the size of the opening 13 are adjusted and the dry etching is carried out to enable the size of the curved-surface recessed part to be adjusted, thereby easily adjusting the astigmatism of the lens.