发明名称 MOUNTING DEVICE
摘要 PURPOSE:To mount a pellet at the center of an island by recognizing the island of a lead frame as a binary image to detect the shift of its position, and moving a mounting arm in response thereto for correction. CONSTITUTION:The island 6 of a lead frame 4 on a mounting stage 5 is recognized by a recognition camera 1 as a binary image to detect the shift of the center of the stage 5 from the center of the island 6. An arm 2 to which a pellet 3 is attracted is moved to be corrected in directions X, Y, theta in response to the shift detected previously on the stage 5 to mount the pellet 3 at the center of the island 6.
申请公布号 JPH01217929(A) 申请公布日期 1989.08.31
申请号 JP19880043748 申请日期 1988.02.25
申请人 NEC KYUSHU LTD 发明人 EGUCHI KATSUMI
分类号 H01L21/52 主分类号 H01L21/52
代理机构 代理人
主权项
地址