| 摘要 |
PURPOSE:To aim at an efficient washing of a vacuum container having an intricate shape, by applying voltage in parallel from a single electric source to a plurality of electrodes being discharge sources provided in the vacuum container and providing variable resistors in the circuits between the electric source and each electrode, respectively. CONSTITUTION:There are provided a vacuum container 1 to be discharge washed or the vacuum container 1 containing an object to be washed, an evacua tor 2 for removing air from this container, a device 4 for introducing a plasma forming gas in the container 1 and discharge sources in the container 1 for discharging electricity. The container 1 is provided with a plurality of electrodes 3a-3c which are discharge sources and to which voltage is applied in parallel from a single electric source 7. Also provided are variable resistors 6a-6c in the circuits between the electric source 7 and each electrode, respectively. As a result, an efficient degassing washing of the vacuum container having an intricate shape or internal parts therein can be effected. |
