APPARATUS FOR CORRECTING FLATNESS OF THIN SHEET-LIKE OBJECT,申请号JP19880045104-传众专利搜索

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发明名称	APPARATUS FOR CORRECTING FLATNESS OF THIN SHEET-LIKE OBJECT
摘要
申请公布号	JPH01218020(A)	申请公布日期	1989.08.31
申请号	JP19880045104	申请日期	1988.02.26
申请人	CANON INC	发明人	TAKAHASHI KAZUO
分类号	G12B5/00;H01L21/027;H01L21/30	主分类号	G12B5/00
代理机构		代理人
主权项
地址

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