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发明名称
CELL FOR VACUUM FACILITY
摘要
申请公布号
JPH01218628(A)
申请公布日期
1989.08.31
申请号
JP19890006064
申请日期
1989.01.17
申请人
JIIKUFURIIDO SHIERUTORAA
发明人
FURIIDORITSUHI GAIZAA
分类号
B01J3/02;B01J3/03;B65D90/58;H01J37/18
主分类号
B01J3/02
代理机构
代理人
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地址
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