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发明名称
VAPOR GROWTH APPARATUS
摘要
申请公布号
JPH01218011(A)
申请公布日期
1989.08.31
申请号
JP19880045025
申请日期
1988.02.26
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
HASE NOBUYASU;TAKEUCHI YOSHINORI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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