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发明名称
INTEGRATED CIRCUIT
摘要
申请公布号
JPH01217278(A)
申请公布日期
1989.08.30
申请号
JP19880043598
申请日期
1988.02.26
申请人
MITSUBISHI ELECTRIC CORP
发明人
YAMAZAKI HIROMI
分类号
G01R31/28;H01L21/66;H01L21/822;H01L27/04
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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