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发明名称
METHOD AND APPARATUS FOR DETECTING DEFECT INFORMATION IN A HOLOGRAPHIC IMAGE PATTERN
摘要
申请公布号
EP0214436(A3)
申请公布日期
1989.08.30
申请号
EP19860110369
申请日期
1986.07.28
申请人
INSYSTEMS, INC.
发明人
CAVAN, DANIEL L.
分类号
G01N21/956;(IPC1-7):G01N21/88
主分类号
G01N21/956
代理机构
代理人
主权项
地址
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