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发明名称
METHOD OF DIFFUSING SI INTO COMPOUND SEMICONDUCTOR AND COMPOUND SEMICONDUCTOR DEVICE
摘要
申请公布号
EP0315387(A3)
申请公布日期
1989.08.30
申请号
EP19880310200
申请日期
1988.10.31
申请人
MITSUBISHI DENKI KABUSHIKI KAISHA
发明人
MURAKAMI, TAKASHI C/O MITSUBISHI DENKI
分类号
H01L21/033;H01L21/22;H01L21/225;H01S5/20;(IPC1-7):H01L21/225;H01S3/19
主分类号
H01L21/033
代理机构
代理人
主权项
地址
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