APPARATUS FOR MEASURING LINEAR DIMENSINS AND SHAPE OF ELEMENTS ON PLANAR OBJECTS WITH DIFFRACTION TEST STRUCTURES,申请号SU19884361497-传众专利搜索

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发明名称	APPARATUS FOR MEASURING LINEAR DIMENSINS AND SHAPE OF ELEMENTS ON PLANAR OBJECTS WITH DIFFRACTION TEST STRUCTURES
摘要
申请公布号	SU1504497(A1)	申请公布日期	1989.08.30
申请号	SU19884361497	申请日期	1988.01.11
申请人	SHATS YAKOV B,SU;KLISHINA TATYANA V,SU;LYSOV VIKTOR,SU	发明人	SHATS YAKOV B,SU;KLISHINA TATYANA V,SU;LYSOV VIKTOR I,SU
分类号	G01B11/02	主分类号	G01B11/02
代理机构		代理人
主权项
地址

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