A method and an apparatus for evaluating the gas purifying ability of a gas purifier.

摘要

A method and an apparatus for evaluating the gas purifying ability of a gas purifier (3) are described. The method for evaluating the gas purifying ability comprises the steps of sealing the gas purifier (3) while reducing the inner gas pressure of the gas purifier (3), releasing a desirable impurity gas shut within a tank (12) at a higher inner gas pressure than the inner gas pressure of the gas purifier (3), to the sealed gas purifier (3), and measuring the gas releasing ability of the impurity gas to the gas purifier (3).