| 摘要 |
PURPOSE:To increase a substantial reaction area and to facilitate the migration of ions and to increase the sensitivity by forming many projections and recesses where working electrodes and counter electrodes are formed on the surface of an insulating substrate and forming a groove at substrate parts between the working electrodes and counter electrodes. CONSTITUTION:The working electrodes, counter electrodes 30, and a reference electrode 40 are formed on the insulating substrate 1. The reaction parts of the working electrodes 20 and counter electrodes 30 are formed in a comb shape. Many recess parts (b) and projection parts (a) are formed on the substrate where those reaction parts are formed. The groove 10 which is deeper than the depth H of the recess and projection pats (b) and (a) is formed in the insulating substrate 1. A solid electrolyte layer 6 is charged in the recess parts (b) and groove 10. The substantial reaction area increases because of the recess and projection parts (a) and (b), so the sensitivity of the sensor increases. The electrolyte layer at the part of the groove 10 is thick, so ion conduction between the working electrodes 20 and counter electrodes 30 is made easy and the sensitivity is further improved. This sensor is applicable as a gas detection sensor, an ion sensor, a biosensor, etc. |
