| 摘要 |
<p>PURPOSE:To impart a suitable damping, and to accurately position at a high speed by a positioning device in which a plurality of holes are formed at a base to isolate the base from a table section so that the table section is movable with respect to the base by sealing a viscous material at least in a part of the holes. CONSTITUTION:Arms 2a protrudes from the periphery of a table 2, and the other end of an actuator 4 secured at its one end to a base 1 is attached to the arm 1a. The actuator 4 is composed, for example, of a piezoelectric element to be telescopic by applying a voltage thereto. Viscous material 8 such as silicone rubber is sealed in the holes 7 formed to form a thin hinge 3. The material 8 is so sealed as to be filled at least in the periphery of the hinge 3. The rubber is easily poured in the hole 7, and not fed out due to its suitable viscosity, thereby obtaining a suitable damping effect.</p> |
