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经营范围
发明名称
Sputtered titanium oxynitride films
摘要
A sputtered titanium oxynitride film is disclosed, as well as a low emissivity coated article comprising a titanium oxynitride film in combination with a highly infrared reflective metal film, such as silver.
申请公布号
US4861669(A)
申请公布日期
1989.08.29
申请号
US19870031319
申请日期
1987.03.26
申请人
PPG INDUSTRIES, INC.
发明人
GILLERY, FRANK H.
分类号
C23C14/06
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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