发明名称 Projection optical system for use in precise copy
摘要 A projection optical system for use in a precise copy which uses a pair of catadioptric optical systems consisting of convex mirrors, concave mirrors, and phase correction members is shown. Two catadioptric optical systems commonly use an entrance pupil on a coaxis and are coupled so as to respectively face the phase correction members. Each of the concave mirrors has an opening at the center. Each of the convex mirrors has no opening in one embodiment but has an opening portion at the center in another embodiment.
申请公布号 US4861148(A) 申请公布日期 1989.08.29
申请号 US19870024134 申请日期 1987.03.11
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., INC. 发明人 SATO, TAKEO;ARAKI, NOBUHIRO;KAWATA, KOICHI;NOMURA, NOBORU;UENO, ATUSHI;YOSHIDA, SHOTARO
分类号 G02B17/08;G03F7/20 主分类号 G02B17/08
代理机构 代理人
主权项
地址