| 摘要 |
PURPOSE:To hold data regarding a photomask in an IC substrate and to eliminate a control slip by fixing a specific IC substrate to one side of a photomask substrate. CONSTITUTION:A recessed part 1a which fixes an EPROM chip 2b is on the edge of the photomask substrate 1. I the said chip 2, the EPROM chip 2b is loaded onto the center of a glass substrate 2a, and a projecting strip provided at the opposite end thereof is joined to the slide groove provided on the recessed inner wall of the substrate 1 by sliding. The intelligent photomask 3 composed in this way is fitted to a device which can write and read data to its EPROM and erase stored contents. Consequently the device can write, read and erase the date regarding the photomask through a conductive pad 2c. |
