| 摘要 |
PURPOSE:To keep an adhesive property of a load feeding layer to a heat resistor good, by a method wherein a load feeding layer is composed of an adhesion layer and a gold conductive layer laminated thereon, and a line width of the adhesion layer is established as being wider than that of the gold conductive layer. CONSTITUTION:A load feeding layer 3 is composed of an adhesion layer 3a of NiCr or the like and a gold conductive layer 3b laminated this adhesion layer 3a, and a line width of the adhesion layer 3a is established as being about 5mum thicker each on one side than the line width of a gold conductive layer 3b. Consequently, since a photo resist pattern for patterning of the adhesion layer 3a is applied to a lower layer in a range of exceeding the line width of the gold conductive layer 3b in a manufacturing process of the load feeding layer 3, even through the lower layer positions corresponding to both side edge of the gold conductive layer 3b are over etched in an etching process, the line width of the adhesion layer 3a is never made narrower than the line width of the gold conductive layer 3b, and a practical adhesion area of the gold conductive layer 3b can be enough secured. |
