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发明名称
METHOD FOR FORMING DIAMOND THIN FILM
摘要
申请公布号
JPH01215797(A)
申请公布日期
1989.08.29
申请号
JP19880042645
申请日期
1988.02.25
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
UENO AKIRA;KITAHATA MAKOTO;MITSUYU TSUNEO
分类号
C30B29/04
主分类号
C30B29/04
代理机构
代理人
主权项
地址
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