SPUTTERING DEVICE PROVIDED WITH SELF-DIAGNOSTIC FUNCTION,申请号JP19880039575-传众专利搜索

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发明名称	SPUTTERING DEVICE PROVIDED WITH SELF-DIAGNOSTIC FUNCTION
摘要
申请公布号	JPH01215976(A)	申请公布日期	1989.08.29
申请号	JP19880039575	申请日期	1988.02.24
申请人	FUJITSU LTD	发明人	INOUE MINORU
分类号	H01L21/285;C23C14/54	主分类号	H01L21/285
代理机构		代理人
主权项
地址

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