| 摘要 |
PURPOSE:To obtain the title sintered form improved in density, thermal conductivity, and thermal, electrical and mechanical properties, by forming a mixed powder comprising AlN powder and a specific additive followed by calcination in a non-oxidative atmosphere. CONSTITUTION:Firstly, a mixed powder is prepared by mixing (A) AlN powder with a purity of >=98% and average particle size of <=10mum and (B) as the additive, a blend of (i) 0.05-17wt.% of Y2O3 and (ii) 0.05-13wt.% of an alkaline earth metal fluoride (e.g., CaF2). Thence, this mixed powder is formed and calcined in a non-oxidative atmosphere at 1,500-2,000 deg.C, thus obtaining the objective AlN sintered form with a thermal conductivity of >=140W/mk (at room temperature). |
