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经营范围
发明名称
VAPOR GROWTH METHOD
摘要
申请公布号
JPH01215026(A)
申请公布日期
1989.08.29
申请号
JP19880039729
申请日期
1988.02.24
申请人
SONY CORP
发明人
MORITA YASUSHI
分类号
H01L21/318
主分类号
H01L21/318
代理机构
代理人
主权项
地址
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