Scanning optical microscope with position detection grating,申请号US19880219516-传众专利搜索

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发明名称	Scanning optical microscope with position detection grating
摘要
申请公布号	US4861982(A)	申请公布日期	1989.08.29
申请号	US19880219516	申请日期	1988.07.15
申请人	U.S. PHILIPS CORPORATION	发明人	SMID, ALBERT;AKKERMANS, ANTONIUS H. M.;BENSCHOP, JOZEF P. H.;ROOYACKERS, CORNELIS J. P. M.
分类号	G02B21/18;G02B21/00	主分类号	G02B21/18
代理机构		代理人
主权项
地址

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