发明名称 Device comprising a flat susceptor rotating parallel to a reference surface about a shift perpendicular to this surface
摘要 A device comprising a flat susceptor rotating parallel to a reference surface about a rotary shaft perpendicular to this surface and comprising means for obtaining the stability of the susceptor held in sustentation and means for obtaining its rotary movement, is characterized in that these means are constituted by the structure of the susceptor, of the rotary shaft and of the reference surface, which cooperate with each other under the action of one or several flow of gas.
申请公布号 US4860687(A) 申请公布日期 1989.08.29
申请号 US19870026497 申请日期 1987.03.16
申请人 U.S. PHILIPS CORPORATION 发明人 FRIJLINK, PETER M.
分类号 H01L21/205;C23C16/44;C30B25/02;C30B25/12 主分类号 H01L21/205
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