| 摘要 |
PURPOSE:To obtain a highly efficient and large-output pulse laser oscillation device by connecting a main electrode to an external peaking capacitor through a disc-like current feedback conductor wherein the surface is insulation-treated and by reducing current path inductance of main discharge current. CONSTITUTION:When a high-voltage high-speed pulse voltage is applied between a high-voltage terminal 7 and a disc-like current return conductor 8 wherein the surface is insulation-treated, spark discharge is ignited between the terminal 7 and a preliminary ionization electrode 6 and a peaking capacitor 9 is charged by flowing current. If voltage of this capacitor 9 increases and strength in electric field at the main discharge space exceeds gas discharge breakdown voltage, discharge breakdown occurs and a high-speed current flows into discharge space in the order of a capacitor 9, a glow discharge 10, a main electrode 3, a disk-like current return conductor 8, and the capacitor 9. Thus, since no discharge breakdown voltage occurs from a main electrode 2 toward a conductor 8 even if th rectifying grid-type current return rout is brought closer to the main electrodes 2 and 3, no discharge breakdown voltage is produced from the main electrode 2 toward the conductor 8, the conductor 8 can be placed closer to the main electrodes 2 and 3. Thus, inductance at the main discharge flow path does not increase and start-up rate of main discharge current is rapid. |
