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发明名称
WAFER ID RECOGNIZING DEVICE
摘要
申请公布号
JPH01213766(A)
申请公布日期
1989.08.28
申请号
JP19880039862
申请日期
1988.02.22
申请人
NEC CORP
发明人
NAKAJIMA KEN
分类号
G06K9/20;G06T1/00;H01L21/66
主分类号
G06K9/20
代理机构
代理人
主权项
地址
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