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发明名称
MANUFACTURE OF INTEGRATED CIRCUIT
摘要
申请公布号
JPH01214137(A)
申请公布日期
1989.08.28
申请号
JP19880041167
申请日期
1988.02.23
申请人
NEC CORP
发明人
MIHARA SEIICHIRO
分类号
H01L21/28;H01L21/3205
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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