摘要 |
PURPOSE:To carry out electroless plating at a high rate of deposition without deteriorating the physical properties of a deposited metal by stirring a plating soln. with a gas other than oxygen. CONSTITUTION:Electroless plating is carried out while stirring a plating soln. with a gas other than oxygen or a gaseous mixture of a gas other than oxygen with oxygen. A gas such as hydrogen or carbon dioxide is not, however, suitable for the stirring because it deteriorates the physical properties of a deposited metal. By this method, the formation of unnecessary metal particles is inhibited without deteriorating the physical properties of a deposited metal and electroless plating can be carried out at a high rate of deposition. |