| 摘要 |
<p>PURPOSE:To enable the employment of a piezoelectric element safely for a driving device of a precision equipment by a method wherein the drive element which takes advantage of a piezoelectric effect and a case, which is capable of expanding and contracting in a direction that the drive element is driven, enclosing the driving element hermetically are provided. CONSTITUTION:A piezoelectric element 1 is housed in a stainless steel vessel 2 and both side faces of the element 1 in a direction A that it expands and contracts are in close contact with the inner face of the vessel 2. A bellows- shaped rugged part 2a is provided to the sides perpendicular to the direction A and the expansion and contraction of the piezoelectric element 1 are absorbed through the part 2a. A wire 3 extending from the piezoelectric element 1 is put through a hole bored in the vessel 2, and the wire 3 and the vessel 2 are hermetically sealed through the hermetic seal 4 of ceramic which seals the hole. Therefore, a piezoelectric element can be protected and a short circuit due to a high voltage can be prevented, and moreover a generated gas is prevented from being released even in a vacuum.</p> |
