| 摘要 |
PURPOSE:To make it easy to handle a strain sensor while enhancing the detecting sensitivity and the reliability thereof, by combining coils formed in a spiral pattern with amorphous magnetic metallic member equipped with magnetostriction effect. CONSTITUTION:A sensor 1 is constituted by a coil substrate 11, a thin insulative sheet 12 adhered to the lower surface of the substrate 11, an amorphous magnetic metallic member 13 adhered to the lower surface of the sheet 12 and equipped with magnetostriction effect, and an insulative sheet 14 adhered to the upper surface of the substrate 11. In other words, the amorphous magnetic metallic member 13 is designed to be at least a part of the passage of a magnetic flux generated by coils. Therefore, as the magnetic permeability of the member 13 changes by the tensile force or the compressive force, the inductance value of coils 16a, 16b greatly changes in accordance with the change of the magnetic permeability. Accordingly, if the sensor 1 is bonded to the surface of a structural material by an adhesive or the like, the load applied to the structural material can be known from outputs of the sensor 1, namely, from the change of the inductance value of the coils 16a, 16b. Thus, the strain of the structural material can be detected with high sensitivity. |
