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发明名称
MANUFACTURE OF SEMICONDUCTOR STEM
摘要
申请公布号
JPH01211954(A)
申请公布日期
1989.08.25
申请号
JP19880035383
申请日期
1988.02.19
申请人
FUJITSU LTD
发明人
HASEGAWA OSAMU
分类号
H01L23/12;H01L21/52;H01L23/02
主分类号
H01L23/12
代理机构
代理人
主权项
地址
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