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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01211945(A)
申请公布日期
1989.08.25
申请号
JP19880035171
申请日期
1988.02.19
申请人
TOSHIBA CORP
发明人
HARA HIROYUKI;SUGIMOTO YASUHIRO;NAGAMATSU TORU
分类号
H01L21/822;H01L21/82;H01L27/04;H01L27/08;H01L27/118;H03K19/0944;H03K19/173
主分类号
H01L21/822
代理机构
代理人
主权项
地址
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