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经营范围
发明名称
THIN FILM-FORMING EQUIPMENT
摘要
申请公布号
JPH01212761(A)
申请公布日期
1989.08.25
申请号
JP19880036082
申请日期
1988.02.18
申请人
MITSUBISHI ELECTRIC CORP
发明人
HANAI MASAHIRO
分类号
C23C14/50
主分类号
C23C14/50
代理机构
代理人
主权项
地址
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