| 摘要 |
PURPOSE:To obtain a thin film which is stuck securely on a material to be treated, by disposing a cooled hearth and the material to be treated in a vacuum vessel so as to face each other, and dropping the powder of a multi-component material on the surface of a hard to evaporate material to be irradiated with a beam in the hearth. CONSTITUTION:A hearth 4 which is beforehand cooled with water of an ordinary temp. is disposed in a vacuum vessel 2, and a metallic material 6 such as Al which is hard to evaporate is packed thereon. The electron beam from an electron gun 8 scans the surface of the material 6 and the material 6 is melted but has good conductivity and since the hearth 4 is cooled, the material is not heated and evaporated. Thereupon, the easily evaporative multi-component material, for example, glass powder 13 of a type 1991 is dropped from a powder material supply device 12 on the side of the hearth 4 onto the surface of the material 6. The beam scanning is continued; therefore, the material 13 is irradiated with the beam and since the material has small heat conductivity, it is heated and evaporated instantaneously, and the thin film which does not peel and has high adhesive strength is obtained on the surface of a material 10 to be treated. |
