发明名称 Device for the horizontal transfer of silicon wafers in particular
摘要 The device is characterised in that it has a support foot surface (1) with means for guaranteeing the centring and positioning of two baskets arranged opposite one another in the same axial alignment, this foot surface being equipped axially with a movable arm (2) which has a transfer member which can interact simultaneously with the edge of each individual wafer in order to guarantee the transfer of all wafers in a horizontal plane from one basket into the other basket. <IMAGE>
申请公布号 DE3843369(A1) 申请公布日期 1989.08.24
申请号 DE19883843369 申请日期 1988.12.22
申请人 RECIF S.A., SAINT-ETIENNE, FR 发明人 POLI, BERNARD;CHINCHOLLE, GERARD, SAINT-ETIENNE, FR
分类号 H01L21/677 主分类号 H01L21/677
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