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发明名称
摘要
申请公布号
JPS4637294(Y1)
申请公布日期
1971.12.23
申请号
JP19680002343U
申请日期
1968.01.17
申请人
发明人
分类号
(IPC1-7):H01L21/22;H01L21/20
主分类号
(IPC1-7):H01L21/22
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