| 摘要 |
PURPOSE:To reduce an irregularity in development by the ultrasonic development system which performs development by projecting an ultrasonic wave in one direction by performing the development while rotating a development surface so that the ultrasonic wave is propagated to respective development parts uniformly. CONSTITUTION:A member to be developed is rotated by a rotary mechanism 20 in a prescribed direction so that the development surface 50 of the member rotates in parallel to the transmission direction of the ultrasonic wave 5. Namely, the member is rotated while the development surface 50 is parallel to the propagation direction of the ultrasonic wave 5. For example, when both surfaces of a ceramic disk are developed, the member is rotated while the propagation direction of the ultrasonic wave 5 and the development surface of the ceramic disk are held parallel to each other. Consequently, the distances between respective parts on the development surface 50 and an ultrasonic wave generation source are made uniform and the ultrasonic wave vibration of developing liquid is uniformized at the respective parts to reduce the irregularity in development. |
