UN SISTEMA DE CONTROL DE FLUIDO.

摘要

1286103 Valves INTERNATIONAL BUSINESS MACHINES CORP 5 Sept 1969 [26 Sept 1968] 43961/69 Heading F2V [Also in Divisions G2-G3] Gas flow to a reactor 26 in which integrated circuits are deposited on substrates is controlled by coarse-setting needle valve 23 and by a finesetting pressure regulator 12 subjected at 17 to a loading pressure from a pilot-operated pressure regulator 20 controlled manually or automatically in response to signals derived from mass flow meter 27 or transducer 28 responsive to the pressure drop across the needle valve. Regulator 20 has pilot valve 45 loaded by spring 46 or by fluid pressure, and main supply and vent valves 33, 37a. Gauge 50 can initiate shutdown upon over-pressure.