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发明名称
NONINVASIVE METHOD AND APPARATUS FOR CHARACTERIZATION OF SEMICONDUCTORS
摘要
申请公布号
EP0325453(A3)
申请公布日期
1989.08.23
申请号
EP19890300496
申请日期
1989.01.19
申请人
SEMITEST, INC.
发明人
KAMIENIECKI, EMIL;WOLLOWITZ, MICHAEL;GOLDFARB, WILLIAM C.
分类号
G01R31/265;(IPC1-7):G01R31/26
主分类号
G01R31/265
代理机构
代理人
主权项
地址
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