发明名称 |
Method and apparatus for storing measured data from sub-regions of a sputter crater which is generated and analyzed in a secondary ion mass spectrometer |
摘要 |
A method and an apparatus for storing measured data from a sputter crater which is generated and analyzed in a secondary ion mass spectrometer is considerably more simple and cost-effective than techniques requiring complete data storage and is an improvement over the known standard integral method. The region swept by the ion beam of a secondary ion mass spectrometer is subdivided into a plurality of sub-areas, one location in a memory is assigned to each of the sub-areas, the signal components occurring from the individual sub-areas are stored in the assigned memory locations during a sweep of the sputter crater with the ion beam, and the measured data are evaluated after the end of at least one scan of the sputter crater.
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申请公布号 |
US4860225(A) |
申请公布日期 |
1989.08.22 |
申请号 |
US19880183336 |
申请日期 |
1988.04.07 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
VON CRIEGERN, ROLF;FAZEKAS, PETER;FOTTNER, JOHANNES |
分类号 |
G01N23/225;H01J37/252;H01J37/256;H01J49/00;H01J49/02;H01J49/28 |
主分类号 |
G01N23/225 |
代理机构 |
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地址 |
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