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发明名称
CYLINDRICAL VAPOR GROWTH APPARATUS
摘要
申请公布号
JPH01208469(A)
申请公布日期
1989.08.22
申请号
JP19880032458
申请日期
1988.02.15
申请人
TOSHIBA MACH CO LTD
发明人
KOBAYASHI TAKEHIKO;MIYANOMAE YOSHIHIRO;IGA HIROSHI
分类号
C23C16/44;C23C16/458
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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