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发明名称
EXHAUST STRUCTURE OF DRY ETCHING DEVICE
摘要
申请公布号
JPH01208485(A)
申请公布日期
1989.08.22
申请号
JP19880032204
申请日期
1988.02.15
申请人
SEIKO EPSON CORP
发明人
ASANO YASUHIKO
分类号
C23F4/00
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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