摘要 |
<p>PURPOSE:To simply, easily and inexpensively manufacture a composite piezoelectric element having many pores in the lateral direction of a cylindrical state and excellent anisotropy by superposing green sheets in which organic material to be vanished at the time of baking is added, punching and baking a laminate. CONSTITUTION:Fine powder of lead titanate-zirconate PZT is prepared with high purity PbO, ZrO2, TiO2 through a step of manufacturing ceramics, water, deflocculant, etc., are added, thereto, mixed as a PZT slurry, and a sole unit piezoelectric green sheet 10a is obtained from the slurry. Further, polyethylene particles are added to the slurry as mixture slurry, and a composite piezoelectric green sheet 11a is obtained from the mixture slurry. Then, the sheets 10a and the sheets 11a are alternately laminated to form a laminated green sheet 13a. Then, the sheet 13a is punched by a metal mold to manufacture a cylindrical laminated green sheet 13b, the particles are decomposed to be vanished at a suitable temperature to form pores 12, and than baked in a PbO atmosphere, thereby obtaining a cylindrical composite piezoelectric element 13.</p> |