| 摘要 |
PURPOSE:To facilitate an inspection for a defect in the pattern of an object to be inspected with a simple composition by irradiating light on the object to be inspected, making its reflected light into parallel through a collimator, converting the light into an electric signal, and detecting the defect in the pattern. CONSTITUTION:A collimator 16 is arranged close to a printed wiring board 10, the light to pass through the collimator 16 is made into incident light onto linearly arranged many LEDs 17a and 17b, and a generated charge is outputted through a transferring gate 18 to a picture processor 19. The collimator 16 has many holes linearly arranged in a direction rectangular to the board 10, passes only components, which are parallel to the holes, out of the reflected light of the printed wiring board 10 by light L, and prevents the fuzziness of an image. Further, since the photographed pattern of the printed wiring board 10 is image-formed with the magnification of 1, it is unnecessary to correct the pattern. Thus, the defect in the pattern of the object to be inspected can be easily detected with the simple composition. |
