摘要 |
PURPOSE:To improve the reliability of moisture resistance, by applying flexible moisture-resistant resin to the surface of a plate-like piezoelectric element provided with electrodes. CONSTITUTION:Electrodes 12 splitted into plural sections are formed on the opposite faces of a piezoelectric ceramic 11 polarized in predetermined direction in an ultrasonic motor. One face of a plate-like piezoelectric element 1 formed with the electrodes 12 is adhered through adhesive 5 to a resilient metallic body 2. A flexible moisture-resistant resin layer 6 is formed on a flexible moisture-resistant resin layer 61 applied onto the surface of the element 1 and a flexible moisture-resistant resin layer 62 applied onto the surface at the joint between the element 1 and a resilient metallic body 2 where the adhesive 5 is exposed. A vibrating section 7 is constituted of the resilient metallic body 2 and the flexible moisture-resistant resin layer 6. In the moving section 8, a friction member 4 is secured to a moving body 3, which is pressed to the resilient body 2 and made in contact with the resilient body 2. Consequently intrusion of water into the electrode section and the adhering section can be suppressed. |