| 摘要 |
<p>PURPOSE:To obtain a high voltage supply apparatus generating a high speed pulse suitable for the measurement of high breakdown voltage, by providing a high voltage output means and the floating power supply operating on the output voltage thereof. CONSTITUTION:When a high voltage output means 130 is operated in a voltage mode, the output voltage VOS of a high voltage supply apparatus is set by a DAC 101 and, at this time, a loop consisting of an amplifier 105, a coupling circuit 116, an amplifier 110, a current detecting resistor 117 and an amplifier 111 acts to set V0 to a desired value. The DAC 102 sets the current flowing through the resistor 117 or sets a current limit value, and positive current setting/restriction and negative current setting/restriction are respectively controlled by amplifiers 106, 107. Amplifiers 108, 109 restrict the operation of a floating power supply means 100 when VCF exceeds the output voltage range of the floating power supply means 100 to be ready to change in a positive or negative direction and prevents the generation of spike noise in output.</p> |
