| 摘要 |
<p>PURPOSE:To expand the plasma generation region by fitting a comb-shaped slow-wave circuit with microwave feeding holes on the inner wall face of a container facing a sample and radiating microwaves from a microwave generating circuit to a sample through the feeding holes when the sample is stored in the plasma generating container and plasma-processed. CONSTITUTION:A sample bed 14 mounted with a sample 30 is provided in a plasma generating container 1a having a gas guiding pipe 12, an exhaust pipe 13 and a side wall 1a, the surface of the sample 30 is plasma-processed as follows. A comb-shaped slow-wave circuit 15 is provided on the lower face of the ceiling facing the sample 30 of the container 1a, a wave guide 27 serving as a microwave feeder 29 is closely fitted on it, microwave feeding holes 16 are bored at several places, a low-loss material 17 is packed between the comb teeth surrounding them. Microwaves from a microwave generator not shown in the figure are radiated to the sample 30 through the branch hole 28 of the wave guide 27, feeding holes 16 and the material 17, the plasma with the wavelength shortened by the circuit 15 is expanded in the plasma generation region 40.</p> |
